Avoid Dust Re-adhering and Prevent Static Electricity Damage to the Substrate Pattern with SEPAREL® Hollow-Fiber Membrane Degassing Modules

SEPAREL® membrane degassing technology can help reduce the stationary charge that builds up on the surface of a material. For example, electrostatic overstress (EOS) and electrostatic discharge (ESD) can lead to field failures in semiconductors.

The SEPAREL® membrane degassing module and eFLOW® Series may help to control the specific resistance value of ultra-pure water by supplying carbon dioxide through a hollow fiber gas permeable membrane uniquely developed by DIC. This makes it possible to avoid dust re-adhering, and to prevent static electricity damage to the substrate pattern.

The SEPAREL® Difference

• The simple structure results in few breakdowns.
• Unique pipe distribution system controls the specific resistance value and has excellent stability.
• Long lifespan of the carbon dioxide gas injection module.

 Custom Specifications/Devices

• Clean specification (flow rate up to 30 L/min)
• Low specific resistance (0.25 to 0.05 MΩ·cm) types
• Small/separate electrical section types
• Large flow rate (100 L/min) types
• Other types, customizable

Major Applications

• Mask, reticle cleaning
• Scrubber cleaning
• High-pressure jet cleaning
• Cleaning in the dicing stage
• Cell cleaning